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Method and System for Capillary Force Actuators
For micro-electromechanical systems (MEMS) and bio-MEMS (e.g., micro total analysis systems, or MTAS), a variety of force actuation methods have been used to either move structures or to induce stress in stationary structures, including electromagnetic, electrostatic, pneumatic, thermal, piezoelectric, magnetostrictive, among others. Each of these actuation...
Published: 3/8/2012
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Inventor(s): Carl Knospe
Keywords(s): Electronics
Category(s): Electronic & Optical, Mechanical & Environmental
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